Resolution ：Secondary electron image  5nm
Reproducible precision of measurement ：δ ≦ 0.005μm
Reproducible precision of the position ：Within in  ±  5 μm
Prealignment precision of the loader：Within in  ±  10 μm

throughput：26 wafers/Hour
Vacuum system Ultimate vacuum：IP-1  <2*10-7 Pa
                                                  IP-1  <2*10-6 Pa
                                                  IP-1  <2*10-5 Pa