Canon 设备相关备件耗材
序号 品名
1 掩膜版盒 6inch
2 IMP-2 PCB
3 D Rack Power Supply
4 XY Stage CPU PCB
5 RC robo communication cable
6  Reticle Robot 
7  Cassette Robot
8 6inch SCH Ceramic hand
9 RCRS-5 cable(BG4-7845)
10 ASCD PCB (right side)
11 1st condenser lens drive motor 
12 F2 Trap
13 Laser head
14 No.3 condensor lens seal glass
15 Seal glass used in the lamp house
16 1st condenser seal glass
17 INTERFEROMETER, PYD(X-AXIS)
18 INTERFEROMETER, PYD(Y-AXIS)

 

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Canon设备相关备件耗材

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